Patent Assignment
Reel/Frame 045050/0814
Assignment of Assignor's Interest
Recorded: 2018-02-27
Pages: 6
Assignors
NAGAI, TAKASHI
Executed: 2018-02-16
SATO, HIDEAKI
Executed: 2018-02-21
HARA, HIROMI
Executed: 2018-02-21
YOSHIDA, HIROSHI
Executed: 2018-02-20
HIRAYAMA, TSUKASA
Executed: 2018-02-21
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Liquid Processing Apparatus