Patent Assignment
Reel/Frame 045077/0825
Assignment of Assignor's Interest
Recorded: 2018-03-01
Pages: 8
Assignors
SINCLAIR, FRANK
Executed: 2018-02-26
TIEGER, DANIEL
Executed: 2018-02-27
BECKER, KLAUS
Executed: 2018-02-27
Assignee
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
35 DORY ROAD, GLOUCESTER, MASSACHUSETTS, 01930
Covered Property
(1)
Apparatus and Techniques for Decelerated Ion Beam with No Energy Contamination