Patent Assignment
Reel/Frame 045398/0651
Assignment of Assignor's Interest
Recorded: 2018-03-30
Pages: 8
Assignors
LEI, XINJIAN
Executed: 2016-09-23
KIM, MOO-SUNG
Executed: 2016-09-24
LI, JIANHENG
Executed: 2016-09-23
Assignee
AIR PRODUCTS AND CHEMICALS, INC.
7201 HAMILTON BOULEVARD, ALLENTOWN, PENNSYLVANIA, 18195-1501
Covered Property
(1)
Methods for Depositing a Conformal Metal or Metalloid Silicon Nitride Film and Resultant Films
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.