Patent Assignment
Reel/Frame 045413/0574
Assignment of Assignor's Interest
Recorded: 2018-04-02
Pages: 3
Assignor
DEVILLIERS, ANTON J.
Executed: 2017-09-05
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, AKASAKA BIZ TOWER, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Location-Specific Tuning of Stress to Control Bow to Control Overlay In Semiconductor Processing