Patent Assignment
Reel/Frame 045556/0090
Assignment of Assignor's Interest
Recorded: 2018-04-16
Pages: 10
Assignors
CHEN, HANHONG
Executed: 2018-03-22
CHAN, KELVIN
Executed: 2018-04-13
KRAUS, PHILIP ALLAN
Executed: 2018-03-30
CHUA, THAI CHENG
Executed: 2018-03-29
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Method of Forming Silicon Nitride Films Using Microwave Plasma