Patent Assignment
Reel/Frame 045580/0010
Assignment of Assignor's Interest
Recorded: 2018-04-18
Pages: 3
Assignors
LAVOIE, ADRIEN
Executed: 2018-04-17
AGARWAL, PULKIT
Executed: 2018-04-17
KUMAR, PURUSHOTTAM
Executed: 2018-04-18
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Atomic Layer Etch, Reactive Precursors and Energetic Sources for Patterning Applications