Patent Assignment
Reel/Frame 045808/0576
Assignment of Assignor's Interest
Recorded: 2018-05-15
Pages: 5
Assignor
TOBE, YASUHIRO
Executed: 2018-04-24
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Substrate Removing Method