Patent Assignment
Reel/Frame 045834/0391
Assignment of Assignor's Interest
Recorded: 2018-05-17
Pages: 3
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN ROAD 6, HSINCHU SCIENCE PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Apparatus and Method for Controlling Wafer Uniformity