Patent Assignment
Reel/Frame 045946/0768
Assignment of Assignor's Interest
Recorded: 2018-05-31
Pages: 4
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Manufacturing Apparatus and Manufacturing Method for Semiconductor Device