Patent Assignment
Reel/Frame 045960/0457
Assignment of Assignor's Interest
Recorded: 2018-06-01
Pages: 3
Assignors
MATSUYAMA, SHOICHIRO
Executed: 2018-05-31
TAMARU, NAOKI
Executed: 2018-05-31
SASAKI, YASUHARU
Executed: 2018-05-31
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus, Electrostatic Attraction Method, and Electrostatic Attraction Program