Patent Assignment
Reel/Frame 046400/0112
Assignment of Assignor's Interest
Recorded: 2018-07-19
Pages: 6
Assignors
LI, JIANHENG
Executed: 2018-07-18
VRTIS, RAYMOND NICHOLAS
Executed: 2018-07-19
RIDGEWAY, ROBERT GORDON
Executed: 2018-07-19
XIAO, MANCHAO
Executed: 2018-07-18
LEI, XINJIAN
Executed: 2018-07-18
Assignee
VERSUM MATERIALS US, LLC
8555 SOUTH RIVER PARKWAY, PATENT DEPT., ALLENTOWN, PENNSYLVANIA, 18106-9000
Covered Property
(1)
Precursors and Flowable CVD Methods for Making Low-K Films to Fill Surface Features