Patent Assignment
Reel/Frame 046707/0902
Assignment of Assignor's Interest
Recorded: 2018-08-27
Pages: 5
Assignor
SAITOH, YUSUKE
Executed: 2018-08-21
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Etching Method and Etching Processing Apparatus