Patent Assignment
Reel/Frame 047008/0669
Assignment of Assignor's Interest
Recorded: 2018-09-28
Pages: 12
Assignors
BAIER, JUERGEN
Executed: 2018-09-18
RUNDE, DANIEL
Executed: 2018-09-13
MANGER, MATTHIAS
Executed: 2018-09-18
MUELLER, ULRICH
Executed: 2018-09-03
LICHTENTHAELER, JOERG
Executed: 2018-09-07
ORTHEN, ANDRE
Executed: 2018-09-13
WELKER, JOACHIM
Executed: 2018-09-17
HOLZ, MARKUS
Executed: 2018-09-07
HOLDERER, HUBERT
Executed: 2018-09-26
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Method for Producing an Illumination System for an Euv Projection Exposure System, and Illumination System