Patent Assignment
Reel/Frame 047752/0368
Assignment of Assignor's Interest
Recorded: 2018-11-29
Pages: 2
Assignor
MATSUMOTO, HIROSHI
Executed: 2018-08-06
Assignee
NUFLARE TECHNOLOGY, INC.
8-1, SHINSUGITA-CHO, ISOGO-KU, YOKOHAMA-SHI, KANAGAWA, 235-8522, JAPAN
Covered Property
(1)
Multi Charged Particle Beam Writing Apparatus and Multi Charged Particle Beam Writing Method