Patent Assignment
Reel/Frame 047942/0092
Assignment of Assignor's Interest
Recorded: 2019-01-09
Pages: 3
Assignors
SHAW, DENIS
Executed: 2018-12-19
FAIRBAIRN, KEVIN
Executed: 2018-12-19
CARTER, DANIEL
Executed: 2018-12-21
Assignee
ADVANCED ENERGY INDUSTRIES, INC.
1625 SHARP POINT DRIVE, FORT COLLINS, COLORADO, 80525
Covered Property
(1)
Spatial and Temporal Control of Ion Bias Voltage for Plasma Processing