Patent Assignment
Reel/Frame 047988/0884
Assignment of Assignor's Interest
Recorded: 2019-01-14
Pages: 8
Assignors
ARTEMIEV, NIKOLAY
Executed: 2018-07-17
FRIEDMANN, MICHAEL
Executed: 2018-07-11
KHODYKIN, OLEG
Executed: 2019-01-10
KUZNETSOV, ALEXANDER
Executed: 2018-07-10
WACK, DAN
Executed: 2018-08-27
SHCHEGROV, ANDREI
Executed: 2018-11-02
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Methods And Systems For Semiconductor Metrology Based On Polychromatic Soft X-Ray Diffraction