Patent Assignment
Reel/Frame 048040/0791
Assignment of Assignor's Interest
Recorded: 2019-01-09
Pages: 3
Assignors
FAIRBAIRN, KEVIN
Executed: 2018-12-19
SHAW, DENIS
Executed: 2018-12-19
CARTER, DANIEL
Executed: 2018-12-21
Assignee
ADVANCED ENERGY INDUSTRIES, INC.
1625 SHARP POINT DRIVE, FORT COLLINS, COLORADO, 80525
Covered Property
(1)
Synchronized Pulsing of Plasma Processing Source and Substrate Bias