Patent Assignment
Reel/Frame 048772/0662
Assignment of Assignor's Interest
Recorded: 2019-04-02
Pages: 10
Assignors
TAKEDA, KOICHI
Executed: 2019-01-24
TORIKOSHI, TSUNEO
Executed: 2019-01-24
OISHI, KUNIO
Executed: 2019-01-24
WATANABE, KATSUHIDE
Executed: 2019-01-24
YASUDA, HOZUMI
Executed: 2019-01-24
ISHII, YU
Executed: 2019-01-24
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OTA-KU, TOKYO, 144-8510, JAPAN
Covered Property
(1)
Substrate Processing Control System, Substrate Processing Control Method, and Program