Patent Assignment
Reel/Frame 048875/0542
Assignment of Assignor's Interest
Recorded: 2019-04-12
Pages: 6
Assignors
ARTEMIEV, NIKOLAY
Executed: 2019-03-27
GELLINEAU, ANTONIO
Executed: 2019-03-31
BYKANOV, ALEXANDER
Executed: 2019-04-09
KUZNETSOV, ALEXANDER
Executed: 2019-04-05
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Multilayer Targets For Calibration And Alignment Of X-Ray Based Measurement Systems