Patent Assignment
Reel/Frame 049274/0818
Assignment of Assignor's Interest
Recorded: 2019-05-24
Pages: 3
Assignor
VAN HEUMEN, MARTIJN PETRUS CHRISTIANUS
Executed: 2013-12-17
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL-5504 DR, NETHERLANDS
Covered Property
(1)
Radiation Source, Metrology Apparatus, Lithographic System and Device Manufacturing Method