Patent Assignment
Reel/Frame 049579/0439
Assignment of Assignor's Interest
Recorded: 2019-06-25
Pages: 5
Assignors
CHENG, CHUN-WEN
Executed: 2019-06-05
CHU, CHIA-HUA
Executed: 2019-06-05
KUO, WEN CHENG
Executed: 2019-06-05
MAO, WEI-JHIH
Executed: 2019-06-05
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, HSIN-CHU SCIENCE PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Cmos-Mems Integration with Through-Chip via Process