Patent Assignment
Reel/Frame 049695/0691
Assignment of Assignor's Interest
Recorded: 2019-07-09
Pages: 7
Assignors
TRINH, HAI-DANG
Executed: 2019-06-01
WU, CHII-MING
Executed: 2019-05-31
PAN, SHING-CHYANG
Executed: 2019-05-31
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, HSIN-CHU SCIENCE PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Physical Vapor Deposition Chamber with Target Surface Morphology Monitor