Patent Assignment
Reel/Frame 050132/0152
Assignment of Assignor's Interest
Recorded: 2019-08-22
Pages: 3
Assignee
MATTSON TECHNOLOGY, INC.
47131 BAYSIDE PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Methods for Tuning Plasma Potential Using Variable Mode Plasma Chamber
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.