Patent Assignment
Reel/Frame 050149/0381
Assignment of Assignor's Interest
Recorded: 2019-08-23
Pages: 3
Assignors
KINOSHITA, MORIYOSHI
Executed: 2019-08-15
SASAKI, YUJI
Executed: 2019-08-19
SATO, JUNICHI
Executed: 2019-08-19
ASAKAWA, TAKASHI
Executed: 2019-08-19
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Purging Method