Patent Assignment
Reel/Frame 050614/0520
Assignment of Assignor's Interest
Recorded: 2019-10-03
Pages: 4
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Method and Apparatus for Ascertaining a Repair Shape for Processing a Defect of a Photolithographic Mask