Patent Assignment
Reel/Frame 050630/0126
Assignment of Assignor's Interest
Recorded: 2019-10-04
Pages: 2
Assignors
FENG, CHIEH-NING
Executed: 2019-09-24
HUNG, CHIH-CHANG
Executed: 2019-09-24
CHEN, BING-HUNG
Executed: 2019-09-24
LIN, YIH-ANN
Executed: 2019-09-24
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Residue Removal in Metal Gate Cutting Process