Patent Assignment
Reel/Frame 051051/0430
Assignment of Assignor's Interest
Recorded: 2019-11-19
Pages: 5
Assignors
LEE, YUN
Executed: 2017-08-08
LEE, CHEN-MING
Executed: 2017-08-08
YANG, FU-KAI
Executed: 2017-08-08
HUANG, YI-JYUN
Executed: 2017-08-08
WANG, SHENG-HSIUNG
Executed: 2017-08-08
WANG, MEI-YUN
Executed: 2017-08-08
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Methods for Reducing Contact Depth Variation in Semiconductor Fabrication