Patent Assignment
Reel/Frame 051089/0861
Assignment of Assignor's Interest
Recorded: 2019-11-22
Pages: 8
Assignors
WADA, TOSHIHARU
Executed: 2019-11-13
HSIEH, CHIA-YUN
Executed: 2019-11-13
KO, AKITERU
Executed: 2019-11-22
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method of Line Roughness Improvement by Plasma Selective Deposition