Patent Assignment
Reel/Frame 051189/0023
Assignment of Assignor's Interest
Recorded: 2019-12-05
Pages: 5
Assignor
HAGA, TOSHIO
Executed: 2019-11-26
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Control Method and Plasma Processing Apparatus