Patent Assignment
Reel/Frame 051339/0140
Assignment of Assignor's Interest
Recorded: 2019-12-19
Pages: 6
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OTA-KU, TOKYO, 1448510, JAPAN
Covered Property
(1)
Polishing Apparatus and Polishing Member Dressing Method