Patent Assignment
Reel/Frame 051408/0701
Assignment of Assignor's Interest
Recorded: 2020-01-03
Pages: 10
Assignors
XIE, RUILONG
Executed: 2018-03-30
CHENG, KANGGUO
Executed: 2018-03-29
YEH, CHUN-CHEN
Executed: 2018-04-02
YAMASHITA, TENKO
Executed: 2018-03-30
Assignee
INTERNATIONAL BUSINESS MACHINES CORPORATION
NEW ORCHARD ROAD, ARMONK, NEW YORK, 10504
Covered Property
(1)
Nanosheet Transistor with Dual Inner Airgap Spacers