Patent Assignment
Reel/Frame 051608/0279
Assignment of Assignor's Interest
Recorded: 2020-01-24
Pages: 5
Assignee
BOARD OF TRUSTEES OF MICHIGAN STATE UNIVERSITY
450 ADMINISTRATION BUILDING, EAST LANSING, MICHIGAN, 48824-1046
Covered Property
(1)
Methods and Apparatus for Microwave Plasma Assisted Chemical Vapor Deposition Reactors