Patent Assignment
Reel/Frame 051632/0368
Assignment of Assignor's Interest
Recorded: 2020-01-27
Pages: 6
Assignors
PROCHNAU, JENS
Executed: 2020-01-24
SCHAFFER, DIRK
Executed: 2020-01-21
ORLIK, ROMAN
Executed: 2020-01-14
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Optical Element for the Beam Guidance of Imaging Light in Projection Lithography