Patent Assignment
Reel/Frame 051698/0622
Assignment of Assignor's Interest
Recorded: 2020-02-03
Pages: 5
Assignor
MORIKAWA, KATSUHIRO
Executed: 2020-01-20
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Transfer Device and Substrate Transfer Method