Patent Assignment
Reel/Frame 051819/0794
Assignment of Assignor's Interest
Recorded: 2020-02-14
Pages: 3
Assignors
HIGASHI, AKIO
Executed: 2019-09-04
SASAKI, NARUYASU
Executed: 2019-09-04
TERASAWA, TOSHIHIRO
Executed: 2019-09-04
Assignee
ULVAC, INC.
2500, HAGISONO, CHIGASAKI-SHI, KANAGAWA, 253-8543, JAPAN
Covered Property
(1)
Ion Source, Ion Implantation Apparatus, and Ion Source Operating Method