Patent Assignment
Reel/Frame 052062/0224
Assignment of Assignor's Interest
Recorded: 2020-03-10
Pages: 10
Assignors
MIYADATE, TAKAHARU
Executed: 2020-03-05
TAIRA, TAKASHI
Executed: 2020-03-05
NAGAI, KENJI
Executed: 2020-03-05
NAGASAKI, HIDEAKI
Executed: 2020-03-05
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Apparatus for Processing Substrate and Method for Detecting a Presence of a Focus Ring on a Stage