Patent Assignment
Reel/Frame 052087/0314
Assignment of Assignor's Interest
Recorded: 2020-03-11
Pages: 5
Assignors
CHANDRA, HARIPIN
Executed: 2020-02-25
LEI, XINJIAN
Executed: 2020-02-25
MALLIKARJUNAN, ANUPAMA
Executed: 2020-02-26
KIM, MOO-SUNG
Executed: 2020-02-26
Assignee
VERSUM MATERIALS US, LLC
8555 SOUTH RIVER PARKWAY, PATENT DEPT., TEMPE, ARIZONA, 85284
Covered Property
(1)
Compositions And Methods Using Same For Carbon Doped Silicon Containing Films