Patent Assignment
Reel/Frame 052208/0771
Assignment of Assignor's Interest
Recorded: 2020-03-24
Pages: 3
Assignors
HISATOMI, RYUJI
Executed: 2020-01-06
KOSHIMIZU, CHISHIO
Executed: 2020-01-06
SAITO, MICHISHIGE
Executed: 2020-01-16
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus and Control Method