Patent Assignment
Reel/Frame 052231/0548
Assignment of Assignor's Interest
Recorded: 2020-03-26
Pages: 3
Assignor
CARL ZEISS AG
Executed: 2019-07-10
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Method for Detecting a Structure of a Lithography Mask and Device for Carrying Out the Method
Related Assignments
(6)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Sep 16, 2019
From: MATEJKA, ULRICH
To: CARL ZEISS SMT GMBH
Reel/Frame 050377/0602 →
Assignment of Assignor's Interest
Sep 16, 2019
From: SCHERÜBL, THOMAS
To: CARL ZEISS SMT GMBH
Reel/Frame 050377/0614 →
Assignment of Assignor's Interest
Sep 16, 2019
From: KOCH, MARKUS
To: CARL ZEISS SMT GMBH
Reel/Frame 050377/0623 →
Assignment of Assignor's Interest
Sep 16, 2019
From: HUSEMANN, CHRISTOPH
To: CARL ZEISS AG
Reel/Frame 050377/0630 →
Assignment of Assignor's Interest
Sep 16, 2019
From: STOPPE, LARS
To: CARL ZEISS AG
Reel/Frame 050377/0633 →
Assignment of Assignor's Interest
Sep 16, 2019
From: MOUT, BEAT MARCO
To: CARL ZEISS AG
Reel/Frame 050377/0640 →