Patent Assignment
Reel/Frame 052402/0512
Assignment of Assignor's Interest
Recorded: 2020-04-15
Pages: 5
Assignors
PURVIS, MICHAEL A.
Executed: 2017-11-28
HUMMLER, KLAUS MARTIN
Executed: 2017-11-13
DING, CHENGYUAN
Executed: 2017-11-13
RAFAC, ROBERT JAY
Executed: 2017-11-20
FOMENKOV, IGOR VLADIMIROVICH
Executed: 2017-11-13
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
System for Monitoring a Plasma