Patent Assignment
Reel/Frame 052515/0184
Assignment of Assignor's Interest
Recorded: 2020-04-28
Pages: 7
Assignors
AN, SANGJIN
Executed: 2020-03-26
PARK, MINSEOP
Executed: 2020-03-26
JEONG, CHANYEONG
Executed: 2020-03-26
KANG, SUNGGIL
Executed: 2020-03-26
LEE, YEONGKWANG
Executed: 2020-03-26
Assignee
SAMSUNG ELECTRONICS CO., LTD.
129, SAMSUNG-RO, YEONGTONG-GU, GYEONGGI-DO, SUWON-SI, 16677, KOREA, REPUBLIC OF
Covered Property
(1)
Apparatus and Method for Processing Substrate and Method of Manufacturing Semiconductor Device Using the Method