Patent Assignment
Reel/Frame 053012/0152
Assignment of Assignor's Interest
Recorded: 2020-06-23
Pages: 5
Assignor
WATANABE, YUKI
Executed: 2020-04-20
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OTA-KU, TOKYO, 1448510, JAPAN
Covered Property
(1)
Method, Apparatus, and System for Determining Optimum Operation Recipe for Optical Film-Thickness Measuring Device