Patent Assignment
Reel/Frame 053059/0719
Assignment of Assignor's Interest
Recorded: 2020-06-26
Pages: 5
Assignors
LIU, TZUNG-SHIUN
Executed: 2018-10-22
CHEN, CHUN-LANG
Executed: 2018-10-24
CHEN, CHING-YUEH
Executed: 2018-10-30
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO.8, LI-HSIN RD. 6, SCIENCE BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Apparatus and Method for Developing a Photoresist Coated Substrate