Patent Assignment
Reel/Frame 053334/0460
Assignment of Assignor's Interest
Recorded: 2020-07-28
Pages: 5
Assignors
HUANG, JUI-CHIEN
Executed: 2020-05-25
CHIANG, KUO-CHENG
Executed: 2020-05-25
WANG, CHIH-HAO
Executed: 2020-05-26
JU, SHI NING
Executed: 2020-05-25
CHEN, GUAN-LIN
Executed: 2020-05-25
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Methods of Forming Nano-Sheet-Based Devices having Inner Spacer Structures with Different Widths