Patent Assignment
Reel/Frame 053391/0563
Corrective Assignment to Correct the Application Number Previously Recorded at Reel: 052732 Frame: 0394. Assignor(S) Hereby Confirms the Assignment.
Recorded: 2020-05-25
Pages: 4
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Method