Patent Assignment
Reel/Frame 053417/0879
Assignment of Assignor's Interest
Recorded: 2020-08-06
Pages: 18
Assignors
SHIMMURA, SATOSHI
Executed: 2020-07-16
SHIBASAKI, KENTA
Executed: 2020-07-17
TAKAYANAGI, KOJI
Executed: 2020-07-17
YADA, KENJI
Executed: 2020-07-21
INADA, HIROICHI
Executed: 2020-07-16
SEKI, SHINICHI
Executed: 2020-07-16
OGATA, KENTO
Executed: 2020-07-17
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus