Patent Assignment
Reel/Frame 053470/0295
Assignment of Assignor's Interest
Recorded: 2020-08-12
Pages: 4
Assignors
GARCIA DE GORORDO, ALVARO
Executed: 2020-08-11
YAO, ZHONGHUA
Executed: 2020-08-10
SRINIVASAN, SUNIL
Executed: 2020-07-21
PARK, SANG WOOK
Executed: 2020-07-21
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Cryogenic Atomic Layer Etch with Noble Gases
Patent:
11,087,989 →
Application:
16/905,246 →