Patent Assignment
Reel/Frame 053495/0079
Assignment of Assignor's Interest
Recorded: 2020-08-14
Pages: 5
Assignors
FUJII, KATSUNORI
Executed: 2020-07-07
ITO, MASANORI
Executed: 2020-07-07
IWATA, YASUSHI
Executed: 2020-07-08
Assignee
ULVAC TECHNO, LTD.
2609-5, HAGISONO, CHIGASAKI-SHI, KANAGAWA, 253-8555, JAPAN
Covered Property
(1)
Power Supply Apparatus for Electrostatic Chuck and Substrate Control Method