Patent Assignment
Reel/Frame 053561/0622
Assignment of Assignor's Interest
Recorded: 2020-08-21
Pages: 3
Assignors
WANG, SHANYU
Executed: 2019-08-06
YAN, CHUN
Executed: 2019-08-10
CHUNG, HUA
Executed: 2019-08-06
YANG, MICHAEL X.
Executed: 2019-08-06
Assignee
MATTSON TECHNOLOGY, INC.
47131 BAYSIDE PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Processing Of Workpieces Using Deposition Process And Etch Process
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Aug 21, 2020
From: ZHANG, QI; WANG, SHANYU; SUNG, TSAI WEN
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 053561/0683 →
Assignment of Assignor's Interest
Aug 21, 2020
From: MATTSON TECHNOLOGY, INC.
To: MATTSON TECHNOLOGY, INC.; BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY CO., LTD.
Reel/Frame 053561/0781 →