Patent Assignment
Reel/Frame 053749/0952
Assignment of Assignor's Interest
Recorded: 2020-09-11
Pages: 3
Assignor
IKEGAMI, MASASHI
Executed: 2020-09-04
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Electrostatic Attraction Method and Plasma Processing Apparatus